Organic analytes sensitivity in meso-porous silicon electrical sensor with front side and backside contacts
Chemical sensors fabricated from porous silicon (PSi) for liquid organic analytes (ethanol, acetonitrile, methanol and acetone) are demonstrated, with an emphasis on the impact of the Ag electrical contact placement on sensor performance. Sensors with front side contact display larger shift in capac...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2020-01-01
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| Series: | Arabian Journal of Chemistry |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S187853521730103X |