Comparative studies of the optical absorption coefficient spectra in the implanted layers in silicon with the use of nondestructive spectroscopic techniques

• Main Authors: Krzysztof Dorywalski, Łukasz Chrobak, Mirosław Maliński
• Format: Article
• Language: English
• Published: Polish Academy of Sciences 2020-06-01
• Series: Metrology and Measurement Systems
• Subjects: silicon; ion implantation; optical absorption coefficient spectra; modulated free carrier absorption; photo thermal radiometry; ellipsometry; nondestructive techniques
• Online Access: http://journals.pan.pl/dlibra/publication/132778/edition/116016/content
• ISSN: 2300-1941

Thiswork presents results of comparative studies of the optical absorption coefficient spectra of ion implanted layers in silicon. Three nondestructive and noncontact techniques were used for this purpose: spectroscopic ellipsometry (SE), modulated free carriers absorption (MFCA) and the photo thermal radiometry (PTR). Results obtained with the ellipsometric method are the proof of correctness of the results obtained with the MFCAandPTRtechniques. These techniques are usually used for investigations of recombination parameters of semiconductors. They are not used for investigations of the optical parameters of semiconductors. Optical absorption coefficient spectra of Fe+ and Ge+ high energy and dose implanted layers in silicon, obtained with the three techniques, are presented and compared.