Pulsed Laser Deposition of Indium Tin Oxide Thin Films on Nanopatterned Glass Substrates

Pulsed Laser Deposition of Indium Tin Oxide Thin Films on Nanopatterned Glass Substrates

Indium tin oxide (ITO) thin films were grown on nanopatterned glass substrates by the pulsed laser deposition (PLD) technique. The deposition was carried out at 1.2 J/cm2 laser fluence, low oxygen pressure (1.5 Pa) and on unheated substrate. Arrays of periodic pillars with widths of ~350 nm, heights...

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Bibliographic Details
Main Authors: Marcela Socol, Nicoleta Preda, Oana Rasoga, Andreea Costas, Anca Stanculescu, Carmen Breazu, Florin Gherendi, Gabriel Socol
Format: Article
Language:English
Published: MDPI AG 2018-12-01
Series:Coatings
Subjects:
PLD
ITO
nanoimprint lithography
coatings
Online Access:http://www.mdpi.com/2079-6412/9/1/19

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