Effect of CaF2 on fluorocarbon plasma resistance and thermal properties of CaO-Al2O3-SiO2 glasses

Effect of CaF2 on fluorocarbon plasma resistance and thermal properties of CaO-Al2O3-SiO2 glasses

The effect of CaF2 addition on plasma resistance and thermal properties of CaO-Al2O3-SiO2 (CAS) glasses was investigated. The amount of SiO2 and Al2O3 was fixed to 42.9 and 9.1 (in mol%), respectively, while total amount of CaO and CaF2 was 48 mol% and the ratios of CaO:CaF2 were changed from 10:0 t...

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Bibliographic Details
Main Authors: Jewon Park, Jae Ho Choi, Hyein Na, Hyeong-Jun Kim
Format: Article
Language:English
Published: Taylor & Francis Group 2021-01-01
Series:Journal of Asian Ceramic Societies
Subjects:
aluminosilicate glasses
caf2
plasma resistance
thermal properties
Online Access:http://dx.doi.org/10.1080/21870764.2020.1868079

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