Effect of CaF2 on fluorocarbon plasma resistance and thermal properties of CaO-Al2O3-SiO2 glasses
The effect of CaF2 addition on plasma resistance and thermal properties of CaO-Al2O3-SiO2 (CAS) glasses was investigated. The amount of SiO2 and Al2O3 was fixed to 42.9 and 9.1 (in mol%), respectively, while total amount of CaO and CaF2 was 48 mol% and the ratios of CaO:CaF2 were changed from 10:0 t...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2021-01-01
|
| Series: | Journal of Asian Ceramic Societies |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1080/21870764.2020.1868079 |