Dopant activation and photoresponses of boron-doped silicon by self-assembled molecular monolayers
Self-assembled molecular monolayer doping is an emerging doping technique. In this work, we investigated the activation rate and photoresponses of boron doped silicon by self-assembled molecular monolayer doping. By using low temperature Hall effect measurements and by secondary ion mass spectroscop...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2019-12-01
|
| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5134118 |