Non-self-sustained discharge with hollow anode for plasma-based surface treatment
The paper discusses plasma methods for surface modification using the non-self-sustained glow discharge with a hollow anode. This discharge is characterised by low voltage and high values of electron and ion currents. It can be easily excited in vacuum-arc installations that are widely used for coat...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Sciendo
2016-06-01
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Series: | Nukleonika |
Subjects: | |
Online Access: | https://doi.org/10.1515/nuka-2016-0033 |