THE ELECTRICAL AND MECHANICAL CHARACTERIZATION OF SILICON BASED ELECTROMAGNETIC MICRO-ACTUATOR FOR FLUID INJECTION SYSTEM
Electrical and mechanical properties of Electromagnetic (EM) micro-actuator with silicon membrane has been characterized. The study is aimed to see the effect of the geometry and the structure of the actuator system on the actuating performance of the silicon-based membrane for fluid injection purpo...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor's University
2018-08-01
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| Series: | Journal of Engineering Science and Technology |
| Subjects: | |
| Online Access: | http://jestec.taylors.edu.my/Vol%2013%20issue%208%20August%202018/13_8_23.pdf |