The simulation and the optimization of the quality function of the process of the nanoscale film’s growth
The modeling of processes of formation of thin films in magnetron sputtering systems in the substrate potential field at different ratios of relations between the sprayed material and the substrate for various types of structures of the substrate is considered. Growth models of thin films point emit...
| Main Authors: | , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Saint Petersburg Electrotechnical University "LETI"
2015-10-01
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| Series: | Известия высших учебных заведений России: Радиоэлектроника |
| Subjects: | |
| Online Access: | https://re.eltech.ru/jour/article/view/54 |