Sensitivity improvement techniques for micromechanical vibrating accelerometers
The paper presents the problems of detecting a desired signal generated by micromechanical vibrating accelerometer. Three detection methods, namely frequency, amplitude and phase are considered in this paper. These methods are used in micromechanical vibrating accelerometers that incorporate a force...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2016-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | http://dx.doi.org/10.1051/matecconf/20164802002 |