Conductivity change of defective graphene by helium ion beams
Applying a recently developed helium ion microscope, we demonstrated direct nano-patterning and Anderson localization of single-layer graphene (SLG) on SiO2/Si substrates. In this study, we clarified the spatial-resolution-limitation factor of direct nano-patterning of SLG. Analysis of scanning capa...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2017-04-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4979983 |