Low microwave loss in deposited Si and Ge thin-film dielectrics at single-photon power and low temperatures
In this study, we show that deposited Ge and Si dielectric thin-films can exhibit low microwave losses at single-photon powers and sub-Kelvin temperatures (≈40 mK). This low loss enables their use in a wide range of devices, including coplanar, microstrip, and stripline resonators, as well as layers...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-09-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0041525 |