Recubrimientos de (ti,al)n sobre acero aisi 4140 por sputtering reactivo

Recubrimientos de (ti,al)n sobre acero aisi 4140 por sputtering reactivo

Empleando la técnica de Pulverización catódica con radiofrecuencia y magnetrón (Magnetron Sputtering RF), se prepararon películas de (Ti,Al)N sobre sustratos de acero AISI 4140. Se utilizó un blanco formado con polvos metálicos de Ti y Al, con composición nominal 60% Ti y 40% Al (porcentaje en áto...

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Bibliographic Details
Main Authors:	DANNA GARCIA, ULISES PIRATOBA, ALVARO MARIÑO
Format:	Article
Language:	English
Published:	Universidad Nacional de Colombia 2007-01-01
Series:	Dyna
Online Access:	http://www.redalyc.org/articulo.oa?id=49615217

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