Progress of MEMS Scanning Micromirrors for Optical Bio-Imaging
Microelectromechanical systems (MEMS) have an unmatched ability to incorporate numerous functionalities into ultra-compact devices, and due to their versatility and miniaturization, MEMS have become an important cornerstone in biomedical and endoscopic imaging research. To incorporate MEMS into such...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2015-11-01
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Series: | Micromachines |
Subjects: | |
Online Access: | http://www.mdpi.com/2072-666X/6/11/1450 |