Structure optimization and simulation analysis of the quartz micromachined gyroscope

• Main Authors: Xuezhong Wu, Haoxu Wang, Liqiang Xie, Peitao Dong
• Format: Article
• Language: English
• Published: AIP Publishing LLC 2014-02-01
• Series: AIP Advances
• Online Access: http://dx.doi.org/10.1063/1.4867382

Structure optimization and simulation analysis of the quartz micromachined gyroscope are reported in this paper. The relationships between the structure parameters and the frequencies of work mode were analysed by finite element analysis. The structure parameters of the quartz micromachined gyroscope were optimized to reduce the difference between the frequencies of the drive mode and the sense mode. The simulation results were proved by testing the prototype gyroscope, which was fabricated by micro-electromechanical systems (MEMS) technology. Therefore, the frequencies of the drive mode and the sense mode can match each other by the structure optimization and simulation analysis of the quartz micromachined gyroscope, which is helpful in the design of the high sensitivity quartz micromachined gyroscope.