Studies and Research on the Production of TiO2 and TiN Thin Films by Assisted Physical Vapor Deposition Magnetron Process
The experimental research carried out in this paper aims at obtaining thin films of TiO2 and TiN and at characterizing them in terms of morphology, structure, transparency and electrical properties. The films were obtained using a PVD device of sputtering coating, consisting of a vacuum chamber wit...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Galati University Press
2017-03-01
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| Series: | The Annals of “Dunarea de Jos” University of Galati. Fascicle IX, Metallurgy and Materials Science |
| Subjects: | |
| Online Access: | https://www.gup.ugal.ro/ugaljournals/index.php/mms/article/view/1210 |