Investigation of low-temperature cofired ceramics packages for high-temperature SAW sensors
Surface acoustic wave (SAW) temperature sensor devices have been developed for operating temperatures up to and above 1000 °C. A challenging task to make these devices available on the market is to develop an appropriate housing concept. A concept based on low-temperature cofired ceramics (LTCC) has...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2016-03-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | http://www.j-sens-sens-syst.net/5/85/2016/jsss-5-85-2016.pdf |
| Summary: | Surface acoustic wave (SAW) temperature sensor devices have been developed for operating temperatures up to and above 1000 °C. A challenging task to make
these devices available on the market is to develop an appropriate housing
concept. A concept based on low-temperature cofired ceramics (LTCC) has been
investigated and tested under elevated temperatures up to 600 °C.
The devices showed promising results up to 450 °C. Thorough
analysis of the possible failure mechanisms was done to increase the maximum
temperature above this limit in further production cycles. |
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| ISSN: | 2194-8771 2194-878X |