DESIGN OF MICRO SENSOR WITH CANTILEVER BEAM FOR TEMPERATURE MEASUREMENT
MEMS are systems of tiny devices, easy weight, enhanced performance and dependability detecting wider applications field of industrial, automotive and environment area, particularly in expressions of weather monitoring and estimate. In this work, design and simulation of MEMS sensor for temperat...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
ICT Academy of Tamil Nadu
2016-10-01
|
| Series: | ICTACT Journal on Microelectronics |
| Subjects: | |
| Online Access: | http://ictactjournals.in/paper/IJME_V2_I3_paper_3_269_272.pdf |