DESIGN OF MICRO SENSOR WITH CANTILEVER BEAM FOR TEMPERATURE MEASUREMENT

• Main Authors: A. Nallathambi, T. Shanmuganantham
• Format: Article
• Language: English
• Published: ICT Academy of Tamil Nadu 2016-10-01
• Series: ICTACT Journal on Microelectronics
• Subjects: mems sensor; temperature; cantilever; displacement; sensitivity
• Online Access: http://ictactjournals.in/paper/IJME_V2_I3_paper_3_269_272.pdf

MEMS are systems of tiny devices, easy weight, enhanced performance and dependability detecting wider applications field of industrial, automotive and environment area, particularly in expressions of weather monitoring and estimate. In this work, design and simulation of MEMS sensor for temperature applications was proposed. An inherent platinum material for use temperature sensor can absolutely detect the sensor’s working for temperature. The MEMS sensor is a single of the bimorph cantilever which deflections are felt by application of temperature. Basically, the cantilevers are thermally annealed to relax the thin film stresses. By changing the materials of bimorph, overall sensitivity can be changed. We use both platinum and titanium as the sensing material of temperature sensor to design process to integrate mechanical sensors into for example temperature for micro weather station. Finally, the proposed design can be used as a temperature sensor from 10°C to 60°C and also we obtained platinum as a good sensing material for detecting the temperature.