DESIGN OF MICRO SENSOR WITH CANTILEVER BEAM FOR TEMPERATURE MEASUREMENT
MEMS are systems of tiny devices, easy weight, enhanced performance and dependability detecting wider applications field of industrial, automotive and environment area, particularly in expressions of weather monitoring and estimate. In this work, design and simulation of MEMS sensor for temperat...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
ICT Academy of Tamil Nadu
2016-10-01
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| Series: | ICTACT Journal on Microelectronics |
| Subjects: | |
| Online Access: | http://ictactjournals.in/paper/IJME_V2_I3_paper_3_269_272.pdf |
| Summary: | MEMS are systems of tiny devices, easy weight, enhanced performance
and dependability detecting wider applications field of industrial,
automotive and environment area, particularly in expressions of
weather monitoring and estimate. In this work, design and simulation
of MEMS sensor for temperature applications was proposed. An
inherent platinum material for use temperature sensor can absolutely
detect the sensor’s working for temperature. The MEMS sensor is a
single of the bimorph cantilever which deflections are felt by
application of temperature. Basically, the cantilevers are thermally
annealed to relax the thin film stresses. By changing the materials of
bimorph, overall sensitivity can be changed. We use both platinum and
titanium as the sensing material of temperature sensor to design
process to integrate mechanical sensors into for example temperature
for micro weather station. Finally, the proposed design can be used as
a temperature sensor from 10°C to 60°C and also we obtained platinum
as a good sensing material for detecting the temperature. |
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| ISSN: | 2395-1672 2395-1680 |