An Imperialist Competitive Algorithm Incorporating Remaining Cycle Time Prediction for Photolithography Machines Scheduling
Photolithography machines are the common bottleneck in the semiconductor manufacturing system. The operation constraints in photolithography machines are very complicated, including wafers arriving over time, dedicated machine constraints for critical layers, auxiliary resources’ constrai...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2018-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8513806/ |