Structure and thermal stability of amorphous Co23Fe60B17 film on Si substrate
Structural evolution with thermal annealing of the thin film of amorphous Co23Fe60B17 depositors on Si/SiO2 substrate has been studied using grazing incidence x-ray diffraction, soft x-ray absorption spectroscopy (SXAS), and secondary ion mass spectrometry (SIMS). Amorphous to crystalline transforma...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2021-09-01
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Series: | Applied Surface Science Advances |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2666523921000593 |