A high sensitive photonic crystal Mach-Zehnder-Interferometer based pressure-sensor
PC-MZI based pressure-sensor is modelled and analyzed in this work. Analysis of the pressure sensor is carried out in two phases. The FEM is used for the stress analysis of the diaphragm. The FDTD-method is carried out for analyzing the electromagnetic field characteristics of MZI resonator. This de...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-12-01
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| Series: | Results in Optics |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2666950121000663 |