CVD diamond with boron-doped delta-layers deposited by microwave plasma

CVD diamond with boron-doped delta-layers deposited by microwave plasma

Bibliographic Details
Main Authors:	Vikharev A.L., Gorbachev A.M., Lobaev M.A., Radishev D.B., Isaev V.A., Bogdanov S.A., Drozdov M.N., Demidov E.V., Surovegina E.A., Shashkin V.I., Yunin P.A., Butler J.E.
Format:	Article
Language:	English
Published:	EDP Sciences 2017-01-01
Series:	EPJ Web of Conferences
Online Access:	https://doi.org/10.1051/epjconf/201714901010

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