Effect of a cracked surface of porous silicon on the behaviour of the acoustic signature
We study in this work the effect of a crack, located on the porous silicon, Psi, surface on the propagation of Rayleigh waves. We simulate and analyse the acoustic signature V(z) according porosity at 142 MHz, to study the microstructure of PSi around the crack.
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2014-06-01
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| Series: | MATEC Web of Conferences |
| Online Access: | http://dx.doi.org/10.1051/matecconf/20141204011 |