Improving the performance properties of thin-film silicon-containing coatings by optimizing the operation of the gas supply system of the plasma chemical machine
Aspects of improving the operational properties of thin-film silicon-containing coatings by optimizing the operation of the gas supply system of the plasma-chemical plant for their deposition from arc plasma at atmospheric pressure are considered. To improve the operational properties of the applied...
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| Format: | Article |
| Language: | English |
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Zhytomyr Polytechnic State University
2021-06-01
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| Series: | Технічна інженерія |
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| Online Access: | http://ten.ztu.edu.ua/article/view/234343 |