In situ growth optimization in focused electron-beam induced deposition

In situ growth optimization in focused electron-beam induced deposition

We present the application of an evolutionary genetic algorithm for the in situ optimization of nanostructures that are prepared by focused electron-beam-induced deposition (FEBID). It allows us to tune the properties of the deposits towards the highest conductivity by using the time gradient of the...

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Bibliographic Details
Main Authors: Paul M. Weirich, Marcel Winhold, Christian H. Schwalb, Michael Huth
Format: Article
Language:English
Published: Beilstein-Institut 2013-12-01
Series:Beilstein Journal of Nanotechnology
Subjects:
electron beam induced deposition
genetic algorithm
nanotechnology
tungsten
Online Access:https://doi.org/10.3762/bjnano.4.103

Internet

https://doi.org/10.3762/bjnano.4.103

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