Field-emission electron gun for a MEMS electron microscope
Abstract This article presents a field-emission electron gun intended for use in a MEMS (microelectromechanical system) electron microscope. Its fabrication process follows the technology of a miniature device under development built from silicon electrodes and glass spacers. The electron gun contai...
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| Format: | Article |
| Language: | English |
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Nature Publishing Group
2021-06-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-021-00268-9 |