Study of ultrasonic-hydration compound polishing for sapphire optical channel

In many significant fields like chemical, biological, medical and optical, many kinds of micro-components are three-dimensionally integrated in the microchips of sapphire. Abrasive flow machining technology can effectively improve the inner surface quality of sapphire microchips and improve their ov...

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Bibliographic Details
Main Authors: Qiang Liu, Hongde Wang, Jun Feng, Xiaoqin Zhou, Rongqi Wang, Pengzi Xu
Format: Article
Language:English
Published: AIP Publishing LLC 2019-10-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5114656

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