Study of ultrasonic-hydration compound polishing for sapphire optical channel
In many significant fields like chemical, biological, medical and optical, many kinds of micro-components are three-dimensionally integrated in the microchips of sapphire. Abrasive flow machining technology can effectively improve the inner surface quality of sapphire microchips and improve their ov...
Main Authors: | Qiang Liu, Hongde Wang, Jun Feng, Xiaoqin Zhou, Rongqi Wang, Pengzi Xu |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2019-10-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.5114656 |
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