Study of ultrasonic-hydration compound polishing for sapphire optical channel
In many significant fields like chemical, biological, medical and optical, many kinds of micro-components are three-dimensionally integrated in the microchips of sapphire. Abrasive flow machining technology can effectively improve the inner surface quality of sapphire microchips and improve their ov...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2019-10-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5114656 |