Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams

Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams

A novel structure of the resonant pressure sensor is presented in this paper, which tactfully employs intercoupling between dual pressure-sensing diaphragms and a laterally driven resonant strain gauge. After the resonant pressure sensor principle is introduced, the coupling mechanism of the diaphra...

Full description

Bibliographic Details
Main Authors: Xiaohui Du, Yifang Liu, Anlin Li, Zhou Zhou, Daoheng Sun, Lingyun Wang
Format: Article
Language:English
Published: MDPI AG 2016-01-01
Series:Sensors
Subjects:
resonant pressure sensor
dual diaphragms
mechanical mechanism
combined beams
high precision
microelectromechanical systems (MEMS)
Online Access:http://www.mdpi.com/1424-8220/16/2/158

Internet

http://www.mdpi.com/1424-8220/16/2/158

Similar Items