MEMS Multi-Fields Uniform Model Simulation and Optimization Method Research and Application
To solve the coupling and optimizing problems in MEMS designing and analyzing process, the paper mainly put forward to the uniform model construction simulation method. The method adopt uniform constraints to describe MEMS multi-fields simulation model, firstly construct MEMS model library which inc...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2013-09-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/september_2013/P_1352.pdf |