Laser-Machined Microcavities for Simultaneous Measurement of High-Temperature and High-Pressure

Laser-machined microcavities for simultaneous measurement of high-temperature and high-pressure are demonstrated. These two cascaded microcavities are an air cavity and a composite cavity including a section of fiber and an air cavity. They are both placed into a pressure chamber inside a furnace t...

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Main Authors:	Zengling Ran, Shan Liu, Qin Liu, Ya Huang, Haihong Bao, Yanjun Wang, Shucheng Luo, Huiqin Yang, Yunjiang Rao
Format:	Article
Language:	English
Published:	MDPI AG 2014-08-01
Series:	Sensors
Subjects:	high pressure sensing high temperature sensing laser micromachining micro-cavity simultaneous measurement
Online Access:	http://www.mdpi.com/1424-8220/14/8/14330

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spelling	doaj-06a70c73e0734b3b8d4a6139d336f9502020-11-25T01:28:28ZengMDPI AGSensors1424-82202014-08-01148143301433810.3390/s140814330s140814330Laser-Machined Microcavities for Simultaneous Measurement of High-Temperature and High-PressureZengling Ran0Shan Liu1Qin Liu2Ya Huang3Haihong Bao4Yanjun Wang5Shucheng Luo6Huiqin Yang7Yunjiang Rao8Key Laboratory of Optical Fiber Sensing and Communications (Ministry of Education of China), University of Electronic Science and Technology of China, Chengdu 611731, ChinaKey Laboratory of Optical Fiber Sensing and Communications (Ministry of Education of China), University of Electronic Science and Technology of China, Chengdu 611731, ChinaKey Laboratory of Optical Fiber Sensing and Communications (Ministry of Education of China), University of Electronic Science and Technology of China, Chengdu 611731, ChinaKey Laboratory of Optical Fiber Sensing and Communications (Ministry of Education of China), University of Electronic Science and Technology of China, Chengdu 611731, ChinaKey Laboratory of Optical Fiber Sensing and Communications (Ministry of Education of China), University of Electronic Science and Technology of China, Chengdu 611731, ChinaKey Laboratory of Optical Fiber Sensing and Communications (Ministry of Education of China), University of Electronic Science and Technology of China, Chengdu 611731, ChinaKey Laboratory of Optical Fiber Sensing and Communications (Ministry of Education of China), University of Electronic Science and Technology of China, Chengdu 611731, ChinaKey Laboratory of Optical Fiber Sensing and Communications (Ministry of Education of China), University of Electronic Science and Technology of China, Chengdu 611731, ChinaKey Laboratory of Optical Fiber Sensing and Communications (Ministry of Education of China), University of Electronic Science and Technology of China, Chengdu 611731, ChinaLaser-machined microcavities for simultaneous measurement of high-temperature and high-pressure are demonstrated. These two cascaded microcavities are an air cavity and a composite cavity including a section of fiber and an air cavity. They are both placed into a pressure chamber inside a furnace to perform simultaneous pressure and high-temperature tests. The thermal and pressure coefficients of the short air cavity are ~0.0779 nm/°C and ~1.14 nm/MPa, respectively. The thermal and pressure coefficients of the composite cavity are ~32.3 nm/°C and ~24.4 nm/MPa, respectively. The sensor could be used to separate temperature and pressure due to their different thermal and pressure coefficients. The excellent feature of such a sensor head is that it can withstand high temperatures of up to 400 °C and achieve precise measurement of high-pressure under high temperature conditions.http://www.mdpi.com/1424-8220/14/8/14330high pressure sensinghigh temperature sensinglaser micromachiningmicro-cavitysimultaneous measurement
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	Zengling Ran Shan Liu Qin Liu Ya Huang Haihong Bao Yanjun Wang Shucheng Luo Huiqin Yang Yunjiang Rao
spellingShingle	Zengling Ran Shan Liu Qin Liu Ya Huang Haihong Bao Yanjun Wang Shucheng Luo Huiqin Yang Yunjiang Rao Laser-Machined Microcavities for Simultaneous Measurement of High-Temperature and High-Pressure Sensors high pressure sensing high temperature sensing laser micromachining micro-cavity simultaneous measurement
author_facet	Zengling Ran Shan Liu Qin Liu Ya Huang Haihong Bao Yanjun Wang Shucheng Luo Huiqin Yang Yunjiang Rao
author_sort	Zengling Ran
title	Laser-Machined Microcavities for Simultaneous Measurement of High-Temperature and High-Pressure
title_short	Laser-Machined Microcavities for Simultaneous Measurement of High-Temperature and High-Pressure
title_full	Laser-Machined Microcavities for Simultaneous Measurement of High-Temperature and High-Pressure
title_fullStr	Laser-Machined Microcavities for Simultaneous Measurement of High-Temperature and High-Pressure
title_full_unstemmed	Laser-Machined Microcavities for Simultaneous Measurement of High-Temperature and High-Pressure
title_sort	laser-machined microcavities for simultaneous measurement of high-temperature and high-pressure
publisher	MDPI AG
series	Sensors
issn	1424-8220
publishDate	2014-08-01
description	Laser-machined microcavities for simultaneous measurement of high-temperature and high-pressure are demonstrated. These two cascaded microcavities are an air cavity and a composite cavity including a section of fiber and an air cavity. They are both placed into a pressure chamber inside a furnace to perform simultaneous pressure and high-temperature tests. The thermal and pressure coefficients of the short air cavity are ~0.0779 nm/°C and ~1.14 nm/MPa, respectively. The thermal and pressure coefficients of the composite cavity are ~32.3 nm/°C and ~24.4 nm/MPa, respectively. The sensor could be used to separate temperature and pressure due to their different thermal and pressure coefficients. The excellent feature of such a sensor head is that it can withstand high temperatures of up to 400 °C and achieve precise measurement of high-pressure under high temperature conditions.
topic	high pressure sensing high temperature sensing laser micromachining micro-cavity simultaneous measurement
url	http://www.mdpi.com/1424-8220/14/8/14330
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Laser-Machined Microcavities for Simultaneous Measurement of High-Temperature and High-Pressure

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