Atomic Layer-Deposited Al-Doped ZnO Thin Films for Display Applications

Atomic Layer-Deposited Al-Doped ZnO Thin Films for Display Applications

The integration of high uniformity, conformal and compact transparent conductive layers into next generation indium tin oxide (ITO)-free optoelectronics, including wearable and bendable structures, is a huge challenge. In this study, we demonstrate the transparent and conductive functionality of alu...

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Main Authors: Dimitre Dimitrov, Che-Liang Tsai, Stefan Petrov, Vera Marinova, Dimitrina Petrova, Blagovest Napoleonov, Blagoy Blagoev, Velichka Strijkova, Ken Yuh Hsu, Shiuan Huei Lin
Format: Article
Language:English
Published: MDPI AG 2020-05-01
Series:Coatings
Subjects:
Al-doped ZnO
ALD technique
transparent conductive layers
LC display
flexible PDLC devices
Online Access:https://www.mdpi.com/2079-6412/10/6/539
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spelling doaj-0654ebaee28d4325ac256d8cc5bcbe412020-11-25T02:13:44ZengMDPI AGCoatings2079-64122020-05-011053953910.3390/coatings10060539Atomic Layer-Deposited Al-Doped ZnO Thin Films for Display ApplicationsDimitre Dimitrov0Che-Liang Tsai1Stefan Petrov2Vera Marinova3Dimitrina Petrova4Blagovest Napoleonov5Blagoy Blagoev6Velichka Strijkova7Ken Yuh Hsu8Shiuan Huei Lin9Institute of Solid State Physics, Bulgarian Academy of Sciences, 1784 Sofia, BulgariaDepartment of Photonics, National Chiao Tung University, Hsinchu 30010, TaiwanDepartment of Electrophysics, National Chiao Tung University, Hsinchu 30010, TaiwanInstitute of Optical Materials and Technologies, Bulgarian Academy of Sciences, 1113 Sofia, BulgariaInstitute of Optical Materials and Technologies, Bulgarian Academy of Sciences, 1113 Sofia, BulgariaInstitute of Optical Materials and Technologies, Bulgarian Academy of Sciences, 1113 Sofia, BulgariaInstitute of Solid State Physics, Bulgarian Academy of Sciences, 1784 Sofia, BulgariaInstitute of Optical Materials and Technologies, Bulgarian Academy of Sciences, 1113 Sofia, BulgariaDepartment of Photonics, National Chiao Tung University, Hsinchu 30010, TaiwanDepartment of Electrophysics, National Chiao Tung University, Hsinchu 30010, TaiwanThe integration of high uniformity, conformal and compact transparent conductive layers into next generation indium tin oxide (ITO)-free optoelectronics, including wearable and bendable structures, is a huge challenge. In this study, we demonstrate the transparent and conductive functionality of aluminum-doped zinc oxide (AZO) thin films deposited on glass as well as on polyethylene terephthalate (PET) flexible substrates by using an atomic layer deposition (ALD) technique. AZO thin films possess high optical transmittance at visible and near-infrared spectral range and electrical properties competitive to commercial ITO layers. AZO layers deposited on flexible PET substrates demonstrate stable sheet resistance over 1000 bending cycles. Based on the performed optical and electrical characterizations, several applications of ALD AZO as transparent conductive layers are shown—AZO/glass-supported liquid crystal (LC) display and AZO/PET-based flexible polymer-dispersed liquid crystal (PDLC) devices.https://www.mdpi.com/2079-6412/10/6/539Al-doped ZnOALD techniquetransparent conductive layersLC displayflexible PDLC devices
collection DOAJ
language English
format Article
sources DOAJ
author Dimitre Dimitrov
Che-Liang Tsai
Stefan Petrov
Vera Marinova
Dimitrina Petrova
Blagovest Napoleonov
Blagoy Blagoev
Velichka Strijkova
Ken Yuh Hsu
Shiuan Huei Lin
spellingShingle Dimitre Dimitrov
Che-Liang Tsai
Stefan Petrov
Vera Marinova
Dimitrina Petrova
Blagovest Napoleonov
Blagoy Blagoev
Velichka Strijkova
Ken Yuh Hsu
Shiuan Huei Lin
Atomic Layer-Deposited Al-Doped ZnO Thin Films for Display Applications
Coatings
Al-doped ZnO
ALD technique
transparent conductive layers
LC display
flexible PDLC devices
author_facet Dimitre Dimitrov
Che-Liang Tsai
Stefan Petrov
Vera Marinova
Dimitrina Petrova
Blagovest Napoleonov
Blagoy Blagoev
Velichka Strijkova
Ken Yuh Hsu
Shiuan Huei Lin
author_sort Dimitre Dimitrov
title Atomic Layer-Deposited Al-Doped ZnO Thin Films for Display Applications
title_short Atomic Layer-Deposited Al-Doped ZnO Thin Films for Display Applications
title_full Atomic Layer-Deposited Al-Doped ZnO Thin Films for Display Applications
title_fullStr Atomic Layer-Deposited Al-Doped ZnO Thin Films for Display Applications
title_full_unstemmed Atomic Layer-Deposited Al-Doped ZnO Thin Films for Display Applications
title_sort atomic layer-deposited al-doped zno thin films for display applications
publisher MDPI AG
series Coatings
issn 2079-6412
publishDate 2020-05-01
description The integration of high uniformity, conformal and compact transparent conductive layers into next generation indium tin oxide (ITO)-free optoelectronics, including wearable and bendable structures, is a huge challenge. In this study, we demonstrate the transparent and conductive functionality of aluminum-doped zinc oxide (AZO) thin films deposited on glass as well as on polyethylene terephthalate (PET) flexible substrates by using an atomic layer deposition (ALD) technique. AZO thin films possess high optical transmittance at visible and near-infrared spectral range and electrical properties competitive to commercial ITO layers. AZO layers deposited on flexible PET substrates demonstrate stable sheet resistance over 1000 bending cycles. Based on the performed optical and electrical characterizations, several applications of ALD AZO as transparent conductive layers are shown—AZO/glass-supported liquid crystal (LC) display and AZO/PET-based flexible polymer-dispersed liquid crystal (PDLC) devices.
topic Al-doped ZnO
ALD technique
transparent conductive layers
LC display
flexible PDLC devices
url https://www.mdpi.com/2079-6412/10/6/539
work_keys_str_mv AT dimitredimitrov atomiclayerdepositedaldopedznothinfilmsfordisplayapplications
AT cheliangtsai atomiclayerdepositedaldopedznothinfilmsfordisplayapplications
AT stefanpetrov atomiclayerdepositedaldopedznothinfilmsfordisplayapplications
AT veramarinova atomiclayerdepositedaldopedznothinfilmsfordisplayapplications
AT dimitrinapetrova atomiclayerdepositedaldopedznothinfilmsfordisplayapplications
AT blagovestnapoleonov atomiclayerdepositedaldopedznothinfilmsfordisplayapplications
AT blagoyblagoev atomiclayerdepositedaldopedznothinfilmsfordisplayapplications
AT velichkastrijkova atomiclayerdepositedaldopedznothinfilmsfordisplayapplications
AT kenyuhhsu atomiclayerdepositedaldopedznothinfilmsfordisplayapplications
AT shiuanhueilin atomiclayerdepositedaldopedznothinfilmsfordisplayapplications
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