Investigation of temperature stability of ITO films characteristics

Investigation of temperature stability of ITO films characteristics

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The paper represents research of thermal stability of optical and electro-physical parameters of ITO films deposited using various techniques. Variation of optical and electro-physical parameters was recorded using spectroscopy, and Hall’s and four-probe measurements. The best thermal stability was...

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Main Authors: Troyan Pavel, Zhidik Yury, Zhidik Ekaterina
Format: Article
Language:English
Published: EDP Sciences 2018-01-01
Series:MATEC Web of Conferences
Online Access:https://doi.org/10.1051/matecconf/201714303010
id doaj-0523f862cff34f6a93e107d97af77c03
record_format Article
spelling doaj-0523f862cff34f6a93e107d97af77c032021-02-02T07:35:20ZengEDP SciencesMATEC Web of Conferences2261-236X2018-01-011430301010.1051/matecconf/201714303010matecconf_yssip2017_03010Investigation of temperature stability of ITO films characteristicsTroyan PavelZhidik YuryZhidik EkaterinaThe paper represents research of thermal stability of optical and electro-physical parameters of ITO films deposited using various techniques. Variation of optical and electro-physical parameters was recorded using spectroscopy, and Hall’s and four-probe measurements. The best thermal stability was demonstrated by ITO films deposited by metal target sputtering In(90%)/Sn(10%) in mixture of gases O2 (25%) + Ar (75%) with further annealing in air atmosphere. This enables to apply this technique for production of thin film transparent resistive elements capable to heat the translucent structures up to 100°C without deterioration of their parameters.https://doi.org/10.1051/matecconf/201714303010
collection DOAJ
language English
format Article
sources DOAJ
author Troyan Pavel
Zhidik Yury
Zhidik Ekaterina
spellingShingle Troyan Pavel
Zhidik Yury
Zhidik Ekaterina
Investigation of temperature stability of ITO films characteristics
MATEC Web of Conferences
author_facet Troyan Pavel
Zhidik Yury
Zhidik Ekaterina
author_sort Troyan Pavel
title Investigation of temperature stability of ITO films characteristics
title_short Investigation of temperature stability of ITO films characteristics
title_full Investigation of temperature stability of ITO films characteristics
title_fullStr Investigation of temperature stability of ITO films characteristics
title_full_unstemmed Investigation of temperature stability of ITO films characteristics
title_sort investigation of temperature stability of ito films characteristics
publisher EDP Sciences
series MATEC Web of Conferences
issn 2261-236X
publishDate 2018-01-01
description The paper represents research of thermal stability of optical and electro-physical parameters of ITO films deposited using various techniques. Variation of optical and electro-physical parameters was recorded using spectroscopy, and Hall’s and four-probe measurements. The best thermal stability was demonstrated by ITO films deposited by metal target sputtering In(90%)/Sn(10%) in mixture of gases O2 (25%) + Ar (75%) with further annealing in air atmosphere. This enables to apply this technique for production of thin film transparent resistive elements capable to heat the translucent structures up to 100°C without deterioration of their parameters.
url https://doi.org/10.1051/matecconf/201714303010
work_keys_str_mv AT troyanpavel investigationoftemperaturestabilityofitofilmscharacteristics
AT zhidikyury investigationoftemperaturestabilityofitofilmscharacteristics
AT zhidikekaterina investigationoftemperaturestabilityofitofilmscharacteristics
_version_ 1724299064460181504

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