Removal of Fine Particles from Wafer Surface by Pulse Air Jets [Translated]†
Removal of fine particles from wafer surface by air jets was experimentally investigated in order to seek an effective surface-cleaning method which uses no cleaning liquids. Monodisperse polystyrene latex particles with diameter between 0.25...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hosokawa Powder Technology Foundation
2014-05-01
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| Series: | KONA Powder and Particle Journal |
| Online Access: | https://www.jstage.jst.go.jp/article/kona/12/0/12_1994023/_pdf/-char/en |