CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology

This work demonstrates the feasibility to obtain copper nanoelectromechanical (NEMS) relays using a commercial complementary metal oxide semiconductor (CMOS) technology (ST 65 nm) following an intra CMOS-MEMS approach. We report experimental demonstration of contact-mode nano-electromechanical switc...

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Main Authors:	Jose Luis Muñoz-Gamarra, Arantxa Uranga, Nuria Barniol
Format:	Article
Language:	English
Published:	MDPI AG 2016-02-01
Series:	Micromachines
Subjects:	CMOS-NEMS NEMS NEMS switch copper switch
Online Access:	http://www.mdpi.com/2072-666X/7/2/30

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spelling	doaj-03b4c706c6474ae5923e3e026ca45e152020-11-24T23:48:08ZengMDPI AGMicromachines2072-666X2016-02-01723010.3390/mi7020030mi7020030CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS TechnologyJose Luis Muñoz-Gamarra0Arantxa Uranga1Nuria Barniol2Department of Electronics Engineering, Universitat Autònoma de Barcelona (UAB), Barcelona 08193, SpainDepartment of Electronics Engineering, Universitat Autònoma de Barcelona (UAB), Barcelona 08193, SpainDepartment of Electronics Engineering, Universitat Autònoma de Barcelona (UAB), Barcelona 08193, SpainThis work demonstrates the feasibility to obtain copper nanoelectromechanical (NEMS) relays using a commercial complementary metal oxide semiconductor (CMOS) technology (ST 65 nm) following an intra CMOS-MEMS approach. We report experimental demonstration of contact-mode nano-electromechanical switches obtaining low operating voltage (5.5 V), good ION/IOFF (103) ratio, abrupt subthreshold swing (4.3 mV/decade) and minimum dimensions (3.50 μm × 100 nm × 180 nm, and gap of 100 nm). With these dimensions, the operable Cell area of the switch will be 3.5 μm (length) × 0.2 μm (100 nm width + 100 nm gap) = 0.7 μm2 which is the smallest reported one using a top-down fabrication approach.http://www.mdpi.com/2072-666X/7/2/30CMOS-NEMSNEMSNEMS switchcopper switch
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	Jose Luis Muñoz-Gamarra Arantxa Uranga Nuria Barniol
spellingShingle	Jose Luis Muñoz-Gamarra Arantxa Uranga Nuria Barniol CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology Micromachines CMOS-NEMS NEMS NEMS switch copper switch
author_facet	Jose Luis Muñoz-Gamarra Arantxa Uranga Nuria Barniol
author_sort	Jose Luis Muñoz-Gamarra
title	CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology
title_short	CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology
title_full	CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology
title_fullStr	CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology
title_full_unstemmed	CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology
title_sort	cmos-nems copper switches monolithically integrated using a 65 nm cmos technology
publisher	MDPI AG
series	Micromachines
issn	2072-666X
publishDate	2016-02-01
description	This work demonstrates the feasibility to obtain copper nanoelectromechanical (NEMS) relays using a commercial complementary metal oxide semiconductor (CMOS) technology (ST 65 nm) following an intra CMOS-MEMS approach. We report experimental demonstration of contact-mode nano-electromechanical switches obtaining low operating voltage (5.5 V), good ION/IOFF (103) ratio, abrupt subthreshold swing (4.3 mV/decade) and minimum dimensions (3.50 μm × 100 nm × 180 nm, and gap of 100 nm). With these dimensions, the operable Cell area of the switch will be 3.5 μm (length) × 0.2 μm (100 nm width + 100 nm gap) = 0.7 μm2 which is the smallest reported one using a top-down fabrication approach.
topic	CMOS-NEMS NEMS NEMS switch copper switch
url	http://www.mdpi.com/2072-666X/7/2/30
work_keys_str_mv	AT joseluismunozgamarra cmosnemscopperswitchesmonolithicallyintegratedusinga65nmcmostechnology AT arantxauranga cmosnemscopperswitchesmonolithicallyintegratedusinga65nmcmostechnology AT nuriabarniol cmosnemscopperswitchesmonolithicallyintegratedusinga65nmcmostechnology
_version_	1725487020696928256

CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology

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