Experimental Control of Preparation of Thin Film and Fine Particles by CVD [Translated]†

Experimental Control of Preparation of Thin Film and Fine Particles by CVD [Translated]†

The formation of TiO2 thin film and fine particles by the thermal decomposition of titanium tetraisopropoxide (TTIP)vapor was carried out experimentally using a laminar-flow aerosol reactor (LFAR). TTIP vapor and He gas mixture was introduced...

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Bibliographic Details
Main Authors: Kentaro Ohshima, Yoshifumi Torimoto, Keiichi Tsuto, Kikuo Okuyama, Ryuichi Ushio, Yasuo Kousaka
Format: Article
Language:English
Published: Hosokawa Powder Technology Foundation 2014-06-01
Series:KONA Powder and Particle Journal
Online Access:https://www.jstage.jst.go.jp/article/kona/9/0/9_1991012/_pdf/-char/en

Internet

https://www.jstage.jst.go.jp/article/kona/9/0/9_1991012/_pdf/-char/en

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