Cinética de formación del Al<sub>2</sub>O<sub>3</sub> en capas de aluminio estudiada mediante mediciones eléctricas
In this work a simple method for monitoring the low temperature oxidation of aluminum thin films, which is based on measurements of electrical resistance using the four-probe technique, is proposed. Kinetic growth data of the aluminum oxide layer, obtained using different values of applied current o...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2004-08-01
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| Series: | Boletín de la Sociedad Española de Cerámica y Vidrio |
| Subjects: | |
| Online Access: | http://ceramicayvidrio.revistas.csic.es/index.php/ceramicayvidrio/article/view/437/456 |