SiC based Miniaturized Devices

SiC based Miniaturized Devices

MEMS devices are found in many of today's electronic devices and systems, from air-bag sensors in cars to smart phones, embedded systems, etc. Increasingly, the reduction in dimensions has led to nanometer-scale devices, called NEMS. The plethora of applications on the commercial market speaks...

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Bibliographic Details
Format: eBook
Language:English
Published: Basel, Switzerland MDPI - Multidisciplinary Digital Publishing Institute 2020
Subjects:
History of engineering and technology
3C-SiC
4H-SiC
4H-SiC, epitaxial layer
6H-SiC
aluminum nitride
amorphous SiC
Berkovich indenter
bulge test
bulk micromachining
circular membrane
cleavage strength
critical depth of cut
critical load
deep level transient spectroscopy (DLTS)
deformation
doped SiC
electrochemical characterization
electrochemical etching
electron beam induced current spectroscopy (EBIC)
epitaxial growth
FEM
grazing incidence X-ray diffraction (GIXRD)
high-power impulse magnetron sputtering (HiPIMS)
high-temperature converters
indentation
material removal mechanisms
MEA
mechanical properties
MEMS devices
MESFET
microelectrode array
microstrip detector
n-type
n/a
nanoscratching
negative gate-source voltage spike
neural implant
neural interface
neural probe
p-type
PAE
point defects
power electronics
power module
pulse height spectroscopy (PHS)
radiation detector
Raman spectroscopy
residual stress
Rutherford backscattering spectrometry (RBS)
Schottky barrier
semiconductor radiation detector
SiC
SiC power electronic devices
silicon carbide
simulation
thermally stimulated current spectroscopy (TSC)
thin film
vibrometry
Young's modulus
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