Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices

Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices

Recently, aluminium scandium nitride (AlScN) emerged as a material with superior properties compared to aluminium nitride (AlN). Substituting Al with Sc in AlN leads to a dramatic increase in the piezoelectric coefficient as well as in electromechanical coupling. This discovery finally allowed us to...

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Bibliographic Details
Format:	eBook
Language:	English
Published:	Basel MDPI - Multidisciplinary Digital Publishing Institute 2023
Subjects:	Physics Research & information: general 5G technology alloy scattering AlN AlScN aluminium scandium nitride aluminum nitride aluminum nitride (AlN) aluminum scandium nitride aluminum scandium nitride (AlScN) cantilever beams coercive field complementary switchable diamond thin film elastic properties electromechanical coupling coefficient k2 fabrication fatigue ferroelectric ferroelectrics film high temperature Lamb-wave resonators laser ultrasound leakage current magnetron sputter epitaxy MEMS micromirror microscanner n/a non-metallic substrates nonvolatile memory physical vapor deposition piezoelectric piezoelectric films piezoelectric thin films piezoelectricity potassium hydroxide (KOH) PUND test Q-factor Raman spectroscopy residual stress retention SAW devices ScAlN thin film scandium-aluminum nitride scandium-doped aluminum nitride sputter deposition stress stress gradient structure analysis substrate-RF surface acoustic waves temperature coefficient thermal stability thin film thin films wet etch wurtzite X-ray diffraction
Online Access:	Open Access: DOAB: description of the publication Open Access: DOAB, download the publication

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