Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices

Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices

Recently, aluminium scandium nitride (AlScN) emerged as a material with superior properties compared to aluminium nitride (AlN). Substituting Al with Sc in AlN leads to a dramatic increase in the piezoelectric coefficient as well as in electromechanical coupling. This discovery finally allowed us to...

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Bibliographic Details
Format: eBook
Language:English
Published: Basel MDPI - Multidisciplinary Digital Publishing Institute 2023
Subjects:
Physics
Research & information: general
5G technology
alloy scattering
AlN
AlScN
aluminium scandium nitride
aluminum nitride
aluminum nitride (AlN)
aluminum scandium nitride
aluminum scandium nitride (AlScN)
cantilever beams
coercive field
complementary switchable
diamond thin film
elastic properties
electromechanical coupling coefficient k2
fabrication
fatigue
ferroelectric
ferroelectrics
film
high temperature
Lamb-wave resonators
laser ultrasound
leakage current
magnetron sputter epitaxy
MEMS
micromirror
microscanner
n/a
non-metallic substrates
nonvolatile memory
physical vapor deposition
piezoelectric
piezoelectric films
piezoelectric thin films
piezoelectricity
potassium hydroxide (KOH)
PUND test
Q-factor
Raman spectroscopy
residual stress
retention
SAW devices
ScAlN thin film
scandium-aluminum nitride
scandium-doped aluminum nitride
sputter deposition
stress
stress gradient
structure analysis
substrate-RF
surface acoustic waves
temperature coefficient
thermal stability
thin film
thin films
wet etch
wurtzite
X-ray diffraction
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Internet

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