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  1. 1
    Using the Taguchi Method Experimental Analysis of Electrostatic Chuck(ESC) from Wafer Process to Improve the Offset Parameter Optimization Study
    by Yen Kun-Zhi, 顏&;#22531;至
    Published 2015
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  2. 2
    Using the Taguchi Method Experimental Analysis of Electrostatic Chuck(ESC) from Wafer Process to Improve the Offset Parameter Optimization Study
    by Yen Kun-Zhi, 顏堃至
    Published 2015
    Get full text
    Others
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