Demonstration of Integrated Mico-Electro-Mechanical Switch Circuits for VLSI Applications

by Stojanovic, Vladimir Marko, Chen, Fred Fu-Chin, Fariborzi, Hossein, Spencer, Matthew, Nathanael, Rhesa, Wang, Chengcheng, Gupta, Abhinav, Kam, Hei, Pott, Vincent, Jeon, Jaeseok, Liu, Tsu-Jae King, Markovic, Dejan, Alon, Elad
Published 2011