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  1. 1
    In-situ XPS Investigation of ALD Cu2O and Cu Thin Films after Successive Reduction
    Other Authors: “...TU Chemnitz, Center for Microtechnologies...”
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  2. 2
    Surface chemistry of a Cu(I) beta-diketonate precursor and the atomic layer deposition of Cu2O on SiO2 studied by x-ray photoelectron spectroscopy
    Other Authors: “...TU Chemnitz, Center for Microtechnologies...”
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  3. 3
    In-situ XPS Investigation of the Surface Chemistry of a Cu(I) Beta-Diketonate Precursor and the ALD of Cu2O
    Other Authors: “...TU Chemnitz, Center for Microtechnologies...”
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