Time of Flight Size Control of Carbon Nanoparticles Using Ar+CH₄ Multi-Hollow Discharge Plasma Chemical Vapor Deposition Method

by Sung Hwa Hwang, Kazunori Koga, Yuan Hao, Pankaj Attri, Takamasa Okumura, Kunihiro Kamataki, Naho Itagaki, Masaharu Shiratani, Jun-Seok Oh, Susumu Takabayashi, Tatsuyuki Nakatani
Published 2021-12-01