Sputtering of Mo and Al in D2/N2 plasma cleaning discharge

by V.L. Bukhovets, A.E. Gorodetsky, R.Kh. Zalavutdinov, A.V. Markin, L.P. Kazansky, I.A. Arkhipushkin, A.P. Zakharov, A.M. Dmitriev, A.G. Razdobarin, E.E. Mukhin
Published 2017-08-01