Contrast Experiments in Dielectrophoresis Polishing (DEPP)/Chemical Mechanical Polishing (CMP) of Sapphire Substrate

by Tianchen Zhao, Julong Yuan, Qianfa Deng, Kaiping Feng, Zhaozhong Zhou, Xu Wang
Published 2019-09-01

Orthogonal Experimental Research on Dielectrophoresis Polishing (DEPP) of Silicon Wafer

by Tianchen Zhao, Qianfa Deng, Cheng Zhang, Kaiping Feng, Zhaozhong Zhou, Julong Yuan
Published 2020-05-01