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Paul Mazarov
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Paul Mazarov
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Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources
by
Nico Klingner
,
Gregor Hlawacek
,
Paul
Mazarov
,
Wolfgang Pilz
,
Fabian Meyer
,
Lothar Bischoff
Published 2020-11-01
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