Plasma Diagnostics in Reactive High-Power Impulse Magnetron Sputtering System Working in Ar + H₂S Gas Mixture

by Z. Hubička, M. Čada, A. Kapran, J. Olejníček, P. Kšírová, M. Zanáška, P. Adámek, M. Tichý
Published 2020-03-01